The photoelectric position sensor based on silicon-zinc oxide functional film structure is a product independently developed by the center (ZLCN201410614869.5, etc.). This product has the advantages of high resolution, fast response speed, simple signal output and wide response spectrum range. It has an important application prospect in the fields of precise optical array sensor, surface profiling, rotation control, angle measurement, distance sensor, guidance system and position monitoring.
2. 位置灵敏度可简单调控,最高达65mV/mm。
位置监测、光电探测等领域。